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THE MEMS TECHNOLOGY

The GURADIAL DTS inclination detector calculates spatial position of car body according to decomposition of gravitational force on two sensing axes. The measurement of gravitational acceleration on both axes is done with a single sensor /accelerometer/ manufactured in MEMS technology /Micro Electric Mechanical Systems/ - the technology allowing to produce mechanical micro machines inside the structure of integrated circuit, together with signal conditioning electronics. The sensor used in GURADIAL DTS is determining the decomposition of acceleration, by measuring the distribution of temperature on cavity fabricated in silicon structure, caused by convection from a heat source, also placed inside the integrated circuits structure.

The distinctive feature and main advantage of the sensor used in GURADIAL DTS is the absolute lack of mechanical elements, which guarantees high sensitivity, the possibility of application in wide range of initial angles against horizontal level, high reliability and resistance to mechanical shocks /during transport, crash or c ar body works/. By using the MEMS technology sensor in GURADIAL DTS inclination detector, it was possible to achieve 2% sensitivity /car elevation by 2cm for every meter of length or about 1° as presented in angle units/. These parameters are obtained if the detector is placed up to 45° against horizontal plane.